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Noise in microelectromechanical system resonators.

J R Vig1, Y Kim

  • 1US Army Commun.-Electron. Command, Ft. Monmouth, NJ.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|February 5, 2008
PubMed
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Reducing the size of micro/nano-electromechanical resonators amplifies noise from various sources. This increased noise, particularly from temperature and molecular fluctuations, limits the application of ultra-small resonators.

Area of Science:

  • Physics
  • Electrical Engineering
  • Materials Science

Background:

  • Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) offer resonant frequencies from kHz to GHz.
  • Scaling down resonator dimensions introduces novel noise effects not seen in macro-scale devices.

Purpose of the Study:

  • To investigate how resonator stability and noise characteristics change with decreasing dimensions.
  • To identify key noise sources impacting the performance of small-scale resonators.

Main Methods:

  • Analysis of various noise sources including thermal fluctuations, molecular adsorption/desorption, Brownian motion, Johnson noise, and external vibrations.
  • Examination of the scaling of these noise effects with device dimensions.

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Main Results:

  • For most noise sources, reducing resonator dimensions leads to increased noise levels.
  • At submicron scales, frequency noise from temperature fluctuations, Johnson noise, and adsorption/desorption become dominant limitations.

Conclusions:

  • The stability of MEMS and NEMS resonators is significantly impacted by noise sources that become prominent at smaller scales.
  • These noise limitations may restrict the practical applications of ultra-small resonators, particularly those operating at submicron dimensions.