Control of voice coil motor nanoscanners for an atomic force microscopy system using a loop shaping technique

Woosub Youm1, Jongkyu Jung, Sungq Lee

  • 1Department of Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Gwangju 500-712, Republic of Korea.

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