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A micromachined surface stress sensor with electronic readout.

Edwin T Carlen¹, Marc S Weinberg, Angela M Zapata

¹The Charles Stark Draper Laboratory, 555 Technology Square, Cambridge, Massachusetts 02139, USA. e.t.carlen@ewi.utwente.nl

The Review of Scientific Instruments

|February 6, 2008

Summary

This study presents a novel micromachined surface stress sensor for detecting changes in surface stress. The sensor accurately measures the stress induced by chemisorbed alkanethiols on gold-coated silicon surfaces.

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Area of Science:

Materials Science
Nanotechnology
Sensor Technology

Background:

Surface stress is a critical parameter in various chemical and physical processes.
Accurate measurement of surface stress is essential for understanding surface phenomena and developing new materials.

Purpose of the Study:

To fabricate and characterize a micromachined surface stress sensor.
To integrate the sensor with a low-noise electronic readout circuit for high-sensitivity measurements.
To quantify the surface stress changes induced by chemisorbed alkanethiols.

Main Methods:

Fabrication of a micromachined silicon-based surface stress sensor.
Integration with an off-chip, low-noise, differential capacitance electronic readout circuit.
High-frequency carrier signal modulation and synchronous demodulation for signal processing.

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Main Results:

The sensor demonstrated a differential surface stress change of approximately -0.42 N m⁻¹ for 1-dodecanethiol and -0.14 N m⁻¹ for 1-butanethiol.
An estimated measurement resolution of 0.12 mN m⁻¹ (1 Hz bandwidth) was achieved.
System optimization led to a resolution as high as 3.82 μN m⁻¹.

Conclusions:

The developed micromachined surface stress sensor offers high sensitivity and resolution for detecting surface stress changes.
The sensor is capable of quantifying the effects of chemisorbed alkanethiols on gold surfaces.
This technology has potential applications in chemical sensing and materials characterization.