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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

Real-time vibration measurement by a spatial phase-shifting technique with a tilted holographic interferogram

S Nakadate, M Isshiki

    Applied Optics
    |January 1, 1997
    PubMed

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