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Coating techniques in optical interferometric metrology.

J J Dirckx, W F Decraemer

    Applied Optics
    |May 1, 1997
    PubMed
    Summary
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    Applying white reflective coatings like Chinese ink or MgO significantly enhances optical interferometry measurements. These coatings improve surface reflectivity without introducing significant artifacts, ensuring accurate deformation analysis.

    Area of Science:

    • Optical Engineering
    • Materials Science
    • Metrology

    Background:

    • High and homogeneous diffuse reflectivity is crucial for accurate optical interferometry.
    • Surface coatings can mitigate limitations in optical measurement techniques.
    • Evaluating various white coatings is essential for improving interferometric performance.

    Purpose of the Study:

    • To assess the optical properties of different white reflective coatings for interferometry.
    • To quantify the impact of these coatings on measurement accuracy and artifacts.
    • To demonstrate the effectiveness of optimized coatings in deformation analysis.

    Main Methods:

    • Analysis of optical properties including reflected intensity distribution.
    • Evaluation of coating-induced thickness artifacts using electron microscopy.

    Related Experiment Videos

  • Application of moiré topography to measure deformation on a thin membrane.

    • Main Results:

    • White Chinese ink and MgO coatings exhibit superior optical characteristics compared to bronze powder and TiO(2).
    • Electron microscopy revealed minimal thickness artifacts for Chinese ink (<7.5 µm) and MgO (<17 µm).
    • Deformation measurements on a membrane showed no artifacts within a 2.5 µm precision.

    Conclusions:

    • White Chinese ink and MgO are highly suitable reflective coatings for optical interferometry.
    • These coatings enhance measurement accuracy by improving surface reflectivity.
    • The study validates the use of these coatings for precise deformation metrology.