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Wavelength-multiplexed phase-locked laser diode interferometer using a phase-shifting technique.

T Suzuki, T Muto, O Sasaki

|February 9, 2008

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A novel signal-processing method enhances measurement accuracy in wavelength-multiplexed phase-locked laser diode interferometers. This technique strictly shifts interference signal phase by 2pi, effectively eliminating errors and achieving high precision.

Area of Science:

Optics and Photonics
Metrology
Signal Processing

Background:

Interferometry is crucial for precise measurements.
Wavelength-multiplexed phase-locked laser diode interferometers offer advanced capabilities.
Measurement errors can limit the accuracy of interferometric techniques.

Purpose of the Study:

To introduce a new signal-processing method for error elimination.
To enhance measurement accuracy in wavelength-multiplexed phase-locked laser diode interferometers.
To validate the method through experimental step-height measurement.

Main Methods:

A novel signal-processing technique is proposed.
The method involves a strict 2pi phase shift in the interference signal.

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The technique is applied to a wavelength-multiplexed phase-locked laser diode interferometer.

Main Results:

Measurement errors in the interferometer are effectively eliminated.
The proposed method significantly improves measurement accuracy.
Achieved measurement accuracy is approximately ?/600 with an equivalent wavelength of 80 mm.

Conclusions:

The developed signal-processing method is simple yet highly effective.
This technique offers a substantial advancement in interferometric measurement precision.
The method is experimentally validated, demonstrating its practical applicability.