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Related Experiment Video

Updated: Jul 7, 2026

Fabrication, Operation and Flow Visualization in Surface-acoustic-wave-driven Acoustic-counterflow Microfluidics

Fabrication, Operation and Flow Visualization in Surface-acoustic-wave-driven Acoustic-counterflow Microfluidics

Published on: August 27, 2013

Surface-acoustic-wave (SAW) flow sensor.

¹Dept. of Electr. and Comput. Eng., Marquette Univ., Milwaukee, WI.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

|January 1, 1991

Summary

This summary is machine-generated.

This study introduces a surface-acoustic-wave (SAW) device for gas flow measurement. The SAW sensor offers high sensitivity and a wide dynamic range for accurate flow rate determination.

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Area of Science:

Materials Science
Sensor Technology
Fluid Dynamics

Background:

Accurate gas flow measurement is crucial in various industrial and scientific applications.
Existing flow sensors may have limitations in sensitivity, dynamic range, or response time.

Purpose of the Study:

To describe the development and characterization of a surface-acoustic-wave (SAW) device for gas flow rate measurement.
To evaluate the performance of the SAW sensor in terms of sensitivity, dynamic range, and output characteristics.

Main Methods:

A 73-MHz SAW oscillator on lithium niobate was fabricated and heated above ambient temperature.
The oscillator was placed in a gas flow path, and frequency changes due to convective cooling were measured.
Theoretical expressions for sensor sensitivity and response time were derived.

Main Results:

The SAW sensor demonstrated a frequency variation exceeding 142 kHz for a flow rate range of 0-1000 cm³/min.
The sensor's output can be calibrated for volume flow rate, pressure differential, or mass flow rate.
High sensitivity, wide dynamic range, and direct digital output were observed.

Conclusions:

SAW devices provide a viable and attractive method for gas flow sensing.
The sensor exhibits excellent performance characteristics suitable for various flow measurement needs.
Ultrasonic Lamb wave sensors offer potential for even faster response times compared to SAW sensors.