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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Efficient analysis tool for coupled-SAW-resonator filters.

G Scholl1, A Christ, W Ruile

  • 1Siemens AG, Muenchen.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|January 1, 1991
PubMed
Summary
This summary is machine-generated.

This study presents a new method for designing surface acoustic wave resonator filters by combining coupled-mode (COM) and transmission-matrix approaches. The developed tools offer efficient and accurate analysis and synthesis for these filters.

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Area of Science:

  • Acoustics
  • Electrical Engineering
  • Materials Science

Background:

  • Surface acoustic wave (SAW) resonator filters are crucial components in modern electronic devices.
  • Existing design tools often lack computational efficiency or exactness.
  • Accurate modeling of filter components like gratings and transducers is essential.

Purpose of the Study:

  • To develop exact and computationally efficient analysis and synthesis tools for coupled surface acoustic wave resonator filters.
  • To integrate the strengths of the coupled-mode (COM) formalism and the transmission-matrix approach.
  • To accurately model filter components including gratings, interdigital transducers (IDTs), and multistrip couplers (MSCs).

Main Methods:

  • Combined coupled-mode (COM) formalism with the transmission-matrix approach for filter design.
  • Utilized COM approach to derive closed-form expressions for filter components.
  • Solved COM differential equations and compared results with transmission-matrix and Green's function methods.
  • Incorporated second-order effects like energy storage, propagation loss, and loading.

Main Results:

  • Developed a novel methodology for designing coupled surface acoustic wave resonator filters.
  • Achieved excellent agreement between theoretical predictions and experimental measurements for a sample filter.
  • Demonstrated the accuracy and efficiency of the combined COM and transmission-matrix approach.

Conclusions:

  • The integrated COM and transmission-matrix approach provides a powerful tool for designing SAW resonator filters.
  • The method accurately accounts for critical second-order effects, enhancing filter performance.
  • This work advances the state-of-the-art in acoustic filter design and synthesis.