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Updated: Jul 7, 2026

Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique
Published on: March 24, 2023
Piezoelectric composites with high sensitivity and high capacitance for use at high pressures
Q C Xu1, S Yoshikawa, J R Belsick
1Mater. Res. Lab., Pennsylvania State Univ., University Park, PA.
Abstract:
A type of piezoelectric composite has been developed for oceanographic applications. The composites have a large figure of merit (d(h)xg(h) or d(h )xg(h)/tan delta, where d(h ) is the hydrostatic piezoelectric voltage coefficient), a large dielectric constant (K) and low dielectric loss, and great mechanical strength. A shallow cavity between the PZT ceramics and thick metallic electrode is designed to convert a portion of the z-direction stress into a large radial and tangential stress of opposite sign. thereby causing the d(33) and d(31) contributions to d(h) to add rather than subtract, and raising the figure of merit. Theoretical stress analysis was carried out using an axisymmetric finite element method. Experimental results show that the d(h)x g(h), K, and withstandable pressure are extremely high.
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