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Updated: Jul 7, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Frequency stability of high-overtone bulk-acoustic resonators
D S Bailey1, M M Driscoll, R A Jelen
1Westinghouse Electric Corp., Baltimore, MD.
Abstract:
The results of phase noise measurement for high-overtone bulk-acoustic resonators (HBARs) for use in high-performance oscillators, operating at 640 MHz with insertion losses of 10-15 dB and unmatched Qs greater than 110 K are reported. Noise measurements made on these resonators with input drive levels of 16 dBm have shown self-noise levels of S(y)(f=100 Hz)=8.0x10(-26) for 1/f noise which represents state-of-the-art for a UHF resonator.
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