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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Multipoint laser Doppler vibrometry using holographic optical elements and a CMOS digital camera
Michael J Connelly1, Przemyslaw M Szecówka, Raghavendra Jallapuram
1Department of Electronic and Computer Engineering, Optical Communications Research Group, University of Limerick, Limerick, Ireland. michael.connelly@ul.ie
Optics Letters
|February 19, 2008
Abstract:
A laser Doppler vibrometer (LDV) is described in which holographic optical elements are used to provide the interferometer reference and object illumination beams. A complementary metal-oxide semiconductor camera, incorporating a digital signal processor, is used to carry out real-time signal processing of the interferometer output to allow multipoint LDV to be implemented.

