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Updated: Jul 7, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
A theoretical and experimental study of low-loss SAW filters with interdigitated interdigital transducers
1Dept. of Electr. and Comput. Eng., McMaster Univ., Hamilton, Ont.
Abstract:
A study of low-loss surface-acoustic-wave (SAW) interdigitated interdigital transducer (IIDT) structures is presented. A model based on mixed scattering matrices was used in the analysis. It is shown that the inherent comb frequency response of the IIDT can be smoothed by slanting the transducers in the structure. Alternatively, the combs can be enhanced to produce a compact low-loss feedback element for potential application in multimode oscillators. Experimental verification of the analysis is provided by a 3:2 slanted-finger IIDT filter with a 10% relative bandwidth of 5.9-dB insertion loss, and a comb filter with 13.4-dB insertion loss and comb spacing of about 3 MHz. The measured responses agree quite well with the theory.
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