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Common-path optical heterodyne profilometer: a configuration.

C Chou, J C Shyu, Y C Huang

|February 21, 2008

Summary

This summary is machine-generated.

This study introduces a new common-path optical heterodyne profilometer using a He-Ne laser, improving surface measurement accuracy and repeatability for nanoscale applications.

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Area of Science:

Optics
Metrology
Surface Science

Background:

Conventional optical heterodyne profilometers often suffer from phase errors due to elliptical polarization and non-orthogonal eigenpolarization modes.
Zeeman lasers, commonly used in these systems, present limitations that can be overcome with alternative light sources.

Purpose of the Study:

To develop a novel common-path polarized optical heterodyne profilometer with enhanced symmetry and reduced phase errors.
To investigate the performance of a system utilizing a linearly polarized He-Ne laser and an acousto-optical modulator.

Main Methods:

A new profilometer configuration was established, combining a linearly polarized He-Ne laser with a birefringent lens.
An acousto-optical modulator replaced the Zeeman laser, providing a stable light source with two distinct temporal frequencies.
The system was designed to create a common-path interferometer with a more symmetric structure.

Main Results:

The novel interferometer demonstrates a more symmetric and ideal common-path structure compared to conventional designs.
Phase errors arising from elliptical polarization and non-orthogonality of eigenpolarization modes were significantly reduced.
The system achieved a vertical resolution of 2 Angstroms and a repeatability of 5 Angstroms over a 27-micrometer scanning range.

Conclusions:

The developed common-path optical heterodyne profilometer offers superior performance over traditional systems.
The use of a He-Ne laser and acousto-optical modulator effectively mitigates phase errors, enhancing measurement precision.
This configuration provides a promising advancement for high-resolution surface profile metrology.