High-performance talbot array illuminators

The performance of two-dimensional Talbot array illuminators is discussed in terms of compression ratio, fabrication cost, and illumination efficiency. By comparing two array-illuminator families, we try to answer the question, "Which Talbot array illuminator provides the best illumination performance and requires the least expenditure in fabrication for a given compression ratio?" We further present experimental results obtained with a quartz-glass four-level surface-relief array illuminator designed for a two-dimensional compression ratio of 16 and fabricated with only two lithographic masks.