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Pixel-based absolute topography test for three flats.

R E Parks, L Shao, C J Evans

    Applied Optics
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    This study presents a fast, efficient method for the absolute three-flat test using surface reflection symmetries and pixel data rotation. The technique accurately measures surface flatness, achieving results within 25 nm peak to valley.

    Area of Science:

    • Optical metrology
    • Surface characterization

    Background:

    • Accurate surface flatness testing is crucial in optics manufacturing.
    • Traditional three-flat tests can be complex and time-consuming.

    Purpose of the Study:

    • To develop a computationally efficient method for the absolute three-flat test.
    • To leverage surface symmetries for simplified interferometric measurements.

    Main Methods:

    • Utilizing reflection symmetries of optical surfaces.
    • Implementing an algorithm for rotating pixel data arrays.
    • Employing fast data array manipulations (flips).

    Main Results:

    • Demonstrated the method with both simulated and real-world data.
    • Achieved high accuracy, measuring surfaces flat to less than 25 nm peak to valley.

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  • The method is compatible with commercial phase-measuring interferometers.

    • Conclusions:

    • The proposed method offers a fast and accurate approach to absolute three-flat testing.
    • It simplifies the process by relying on inherent surface symmetries and efficient data processing.