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Carbon/Titanium multilayers as soft-x-ray mirrors for the water window.

H J Stock, G Haindl, F Hamelmann

    Applied Optics
    |February 21, 2008
    PubMed
    Summary

    Researchers developed carbon/titanium (C/Ti) multilayers for soft-x-ray mirrors. Ion polishing enhanced interface smoothness, achieving 11% reflectance at 2.77 nm wavelength for applications in the water window.

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    Area of Science:

    • Materials Science
    • Optics
    • Surface Science

    Background:

    • Soft-x-ray mirrors are crucial for applications in the water window (2.3-4.4 nm).
    • Achieving high reflectance requires smooth interfaces in multilayer structures.
    • Electron-beam evaporation is a common technique for producing thin films.

    Purpose of the Study:

    • To fabricate and characterize C/Ti multilayers for soft-x-ray mirror applications.
    • To investigate the effect of ion polishing on interface smoothness and reflectance.
    • To optimize multilayer structures for operation within the water window.

    Main Methods:

    • Fabrication of C/Ti multilayers using electron-beam evaporation in ultrahigh vacuum.
    • Deposition of multilayers with period thicknesses ranging from 2.1 to 2.7 nm.

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  • In-situ ion polishing of individual layers using an Ar(+) ion beam after deposition.
  • Main Results:

    • Successfully produced C/Ti multilayers with controlled period thicknesses.
    • Demonstrated significant enhancement in interface smoothness due to Ar(+) ion polishing.
    • Achieved a reflectance of approximately 11% at 2.77 nm wavelength for a multilayer with 85 bilayers at a 59-degree angle of incidence.

    Conclusions:

    • C/Ti multilayers are suitable for soft-x-ray mirror applications in the water window.
    • Interface smoothing via ion polishing is critical for enhancing mirror performance.
    • The achieved reflectance demonstrates the potential of this technique for advanced optical applications.