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Microwave bulk-acoustic-wave reflection-grating resonators.

D E Oates1, J Y Pan

  • 1Lincoln Lab., MIT, Lexington, MA.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|January 1, 1988
PubMed
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High-frequency bulk-acoustic-wave (BAW) resonators fabricated using holographic methods achieve high Q factors. This enables low-phase noise oscillators with potential for further performance enhancement.

Area of Science:

  • Materials Science
  • Electrical Engineering
  • Physics

Background:

  • Bulk-acoustic-wave (BAW) resonators are critical components in high-frequency electronic systems.
  • Achieving high Q factors at gigahertz frequencies is essential for low-phase noise oscillators.
  • Existing fabrication techniques face limitations in performance at higher frequencies.

Purpose of the Study:

  • To present a novel fabrication technique for bulk-acoustic-wave (BAW) resonators operating at 1-10 GHz.
  • To demonstrate high Q factors and low phase noise in these BAW resonators.
  • To project future performance improvements and limitations.

Main Methods:

  • Fabrication of BAW resonators using iron-doped lithium niobate.
  • Utilizing optical holographic methods for creating reflection gratings.

Related Experiment Videos

  • Characterization of resonator performance, including Q factor and phase noise.
  • Main Results:

    • Demonstrated Q factors of 30,000 at 1 GHz.
    • Feasible extension to Q of 10,000 at 10 GHz.
    • Achieved single-sideband phase noise floor of <-140 dBc/Hz at 1.14 GHz, matching analytical models.

    Conclusions:

    • The developed holographic fabrication method enables high-performance BAW resonators at high frequencies.
    • The high Q factors directly translate to low phase noise in stabilized oscillators.
    • Projected improvements indicate potential for phase noise below -160 dBc/Hz.