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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
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Thin-film characterization using a scanning laser acoustic microscope with surface acoustic waves

W P Robbins1, R K Mueller, E Rudd

  • 1Dept. of Electr. Eng., Minnesota Univ., Minneapolis, MN.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|January 1, 1988
PubMed

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