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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
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Propagation of boundary acoustic waves along a ZnO layer between two materials

T Irino1, Y Shirosaki, Y Shimizu

  • 1Tokyo Inst. of Technol.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|January 1, 1988
PubMed

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