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Related Experiment Video

Updated: Jul 7, 2026

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
10:39

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics

Published on: August 5, 2020

A modified thickness extensional disk transducer.

S E Trolier1, Q C Xu, R E Newnham

  • 1Mater. Res. Lab., Pennsylvania State Univ., University Park, PA.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|January 1, 1988
PubMed
Summary
This summary is machine-generated.

Photolithography and chemical etching enable precise patterning of piezoelectric devices. This method reduces unwanted vibrations and coupling coefficients in transducers for medical imaging and nondestructive evaluation.

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Area of Science:

  • Materials Science
  • Electrical Engineering
  • Nanotechnology

Background:

  • Miniature piezoelectric devices are crucial for applications like medical imaging.
  • Controlling device geometry is key to optimizing performance and eliminating spurious resonances.
  • Existing fabrication methods may not offer sufficient precision for complex designs.

Purpose of the Study:

  • To investigate photolithography and chemical etching for patterning piezoelectric devices.
  • To explore the fabrication of complex structures from lead zirconate titanate (PZT) substrates.
  • To assess the impact of patterning on device resonances and coupling coefficients.

Main Methods:

  • Utilized photolithography and chemical etching, similar to integrated circuit fabrication.
  • Employed concentrated hydrochloric acid and a commercial photoresist.
  • Fabricated modified thickness-mode resonators from soft lead zirconate titanate (PZT) substrates.

Main Results:

  • Successfully fabricated complex piezoelectric structures.
  • Modified resonators showed significantly smaller amplitudes for lateral resonances.
  • A marked reduction in the effective planar coupling coefficient was observed compared to unaltered disks.

Conclusions:

  • Photolithographic patterning is effective for eliminating spurious resonances in transducers.
  • This technique is valuable for medical imaging and nondestructive evaluation applications.
  • Photolithography allows for engineering low planar coupling coefficients into various substrate materials.