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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics

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Apodization of multilayer bulk-wave transducers.

E Akcakaya¹, E L Adler, G W Farnell

¹Tech. Univ. of Istanbul.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

|January 1, 1989

Summary

Superlattice transducers efficiently generate bulk acoustic waves at gigahertz frequencies. A new calculation method aids in designing these advanced piezoelectric devices for broadband applications.

Area of Science:

Materials Science
Acoustics
Electrical Engineering

Background:

Superlattice transducers are emerging for gigahertz bulk acoustic wave generation.
Existing transducers utilize materials like ZnO or LiNbO(3) with specific crystal orientations.
Characterizing multilayer piezoelectric transducers with arbitrary orientations is complex.

Purpose of the Study:

To develop a robust calculation procedure for the electromechanical characteristics of general multilayer transducers.
To introduce a network model for approximate analysis and synthesis of transducer performance.
To provide a framework for designing broadband superlattice transducers.

Main Methods:

Developed a numerically stable algorithm for calculating electromechanical characteristics of anisotropic, piezoelectric multilayer transducers.

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Derived a network model for approximate transducer analysis and synthesis.

Utilized commercial software for implementation on personal computers.

Main Results:

The described procedure accurately calculates transducer characteristics for complex multilayer structures.
The network model offers valuable insights into transducer performance and design.
Comparative examples demonstrate the efficacy of both the algorithm and the network model.

Conclusions:

A versatile and stable computational method for analyzing multilayer superlattice transducers is established.
The network model provides a practical tool for transducer design and optimization.
These advancements facilitate the development of broadband gigahertz acoustic wave devices.