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Published on: December 2, 2022
Thin film piezoelectric response characterisation using atomic force microscopy with standard contact mode imaging
S Sriram1, M Bhaskaran, K T Short
1Microelectronics and Materials Technology Centre, School of Electrical and Computer Engineering, RMIT University, GPO Box 2476V, Melbourne, Victoria 3001, Australia. sharath.sriram@gmail.com
This study presents a new method to measure piezoelectricity in thin films using atomic force microscopy (AFM). The technique quantifies the electro-mechanical voltage coefficient (d33) directly from AFM scans of strontium-doped lead zirconate titanate (PSZT) films.
Area of Science:
- Materials Science
- Nanotechnology
- Solid State Physics
Background:
- Piezoelectric thin films are crucial for various electronic devices.
- Accurate characterization of their piezoelectric response is essential for performance optimization.
- Standard methods may not be suitable for all thin film applications.
Purpose of the Study:
- To introduce a novel technique for observing and quantifying the piezoelectric response of thin films.
- To validate the technique using strontium-doped lead zirconate titanate (PSZT) thin films.
- To enable direct measurement of the electro-mechanical voltage coefficient, d(33).
Main Methods:
- Utilizing a standard atomic force microscope (AFM) in contact mode.
- Configuring the AFM tip to track film displacement at a single point.
- Applying a sinusoidal voltage across the thin film and measuring time-dependent displacement.
Main Results:
- The technique allows direct quantification of the electro-mechanical voltage coefficient (d33).
- Measurements were performed on PSZT thin films, yielding d(33) values between 109 and 205 pm/V.
- Raster images generated show bands correlating with AFM scan and applied sinusoidal frequencies.
Conclusions:
- The developed AFM-based technique provides a direct and effective method for piezoelectric characterization of thin films.
- This method offers a valuable tool for evaluating materials like PSZT for advanced applications.
- The findings contribute to a better understanding and utilization of piezoelectric thin films.
