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Implementation of a Reference Interferometer for Nanodetection
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Implementation of a Reference Interferometer for Nanodetection

Published on: April 26, 2014

Toward subnanometer uncertainty in interferometric length measurements of short gauge blocks

I Malinovsky1, A Titov, J A Dutra

  • 1Diretoria de Metrologia Científica e Industrial, Divisão de Optica, National Metrology Institute, Avenada Nossa Senhora das Graças 50 Xerém 25250-020 Duque de Caxias, Rio de Janeiro, Brazil. igor.malinovsky@usa.net

Applied Optics
|February 29, 2008
PubMed

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