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Updated: Jul 7, 2026

The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry
Published on: August 12, 2013
Testing of rod objects by grazing-incidence interferometry: experiment
S Brinkmann1, T Dresel, R Schreiner
1Lehrstuhl für Optik, UniversitätErlangen-Nürnberg, Staudtst 7, D-91058 Erlangen, Germany. sven@pi5wsc.physik.unierlangen.de
Abstract:
A grazing-incidence interferometer for the testing of technical surfaces for macroscopic surface deviations is described. Computer-generated holograms serve as beam splitters and references for the workpieces tested. The sensitivity of the interferometer depends on the period of the computer-generated holograms. The method is demonstrated at a rod object of convex profile. Using phase-stepping techniques, the grazing-incidence interferometer provides fast measurements of the entire mantle surface of the test sample with submicrometer precision.
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