Some considerations of reduction of reference phase error in phase-stepping interferometry

J Schwider1, T Dresel, B Manzke

  • 1Lehrstuhl für Optik, Universität Erlangen-Nürnberg Staudtstrasse 7, D-91058 Erlangen, Germany.

Applied Optics
|February 29, 2008
PubMed
Summary

Phase-stepping errors in interferometers cause systematic errors. This study unifies error-compensating algorithms and shows experimental removal of these errors a posteriori using a Twyman-Green interferometer.

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