Comparative study of the roughness of optical surfaces and thin films by use of X-ray scattering and atomic force
V E Asadchikov1, A Duparré, S Jakobs
1Institute of Crystallography, Leninsky prospect 59, Moscow 117333 Russia.
Applied Optics
|February 29, 2008
Abstract:
The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement.
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