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Refractory rf ovens and sputter probes for electron cyclotron resonance ion source

M Cavenago1, A Galatá, T Kulevoy

  • 1INFN-LNL, viale dell'Universitá n 2, Legnaro (PD), Italy. cavenago@lnl.infn.it

The Review of Scientific Instruments
|March 5, 2008
PubMed

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