Multiaperture ion beam extraction from gas-dynamic electron cyclotron resonance source of multicharged ions

Electron cyclotron resonance ion source with quasi-gas-dynamic regime of plasma confinement (ReGIS), constructed at the Institute of Applied Physics, Russia, provides opportunities for extracting intense and high-brightness multicharged ion beams. Despite the short plasma lifetime in a magnetic trap of a ReGIS, the degree of multiple ionization may be significantly enhanced by the increase in power and frequency of the applied microwave radiation. The present work is focused on studying the intense beam quality of this source by the pepper-pot method. A single beamlet emittance measured by the pepper-pot method was found to be approximately 70 pi mm mrad, and the total extracted beam current obtained at 14 kV extraction voltage was approximately 25 mA. The results of the numerical simulations of ion beam extraction are found to be in good agreement with experimental data.