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Experimental Methods for Trapping Ions Using Microfabricated Surface Ion Traps
Published on: August 17, 2017
Compact electron beam ion sources/traps: review and prospects
G Zschornack1, M Kreller, V P Ovsyannikov
1Institute of Applied Physics, Dresden University of Technology, Dresden, Germany. g.zschornack@fzd.de
The Review of Scientific Instruments
|March 5, 2008
Summary
Researchers developed three generations of compact Dresden electron beam ion traps (EBIT) and sources (EBIS), achieving high ion charge states and demonstrating applications in focused ion beams and nanostructure production.
Area of Science:
- Atomic Physics
- Plasma Physics
- Ion Source Technology
Background:
- Compact table-top ion sources are crucial for various scientific applications.
- The Dresden EBIT/EBIS family offers economical and efficient ion generation.
Purpose of the Study:
- To report the development of three generations of Dresden EBIT/EBIS ion sources.
- To characterize their performance in terms of ion currents and X-ray spectra.
- To demonstrate their application potential.
Main Methods:
- Development and testing of three successive Dresden EBIT/EBIS generations.
- Measurement of extractable ion currents at various charge states.
- Analysis of X-ray spectra emitted by ions within the electron beam.
- Proof-of-concept application demonstrations.
Main Results:
- Successful extraction of ion charge states up to Xe(48+) and bare nuclei of elements up to Nickel.
- Demonstrated applications in focused ion beam (FIB) columns and nanostructure fabrication.
- Characterization of X-ray spectra and ion currents for different operating conditions.
Conclusions:
- The Dresden EBIT/EBIS family provides versatile and high-performance ion sources.
- These sources have significant potential for applications in materials science and fundamental research.
- The next generation, Dresden EBIS-SC, will offer cryogen-free superconducting high-field operation for even higher currents.
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