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Status of ITEP decaborane ion source program
T V Kulevoy1, S V Petrenko, R P Kuibeda
1Institute for Theoretical and Experimental Physics, Moscow, Russia. kulevoy@itep.ru
The Review of Scientific Instruments
|March 5, 2008
Abstract:
The joint research and development program is continued to develop steady-state ion source of decaborane beam for ion implantation industry. Both Freeman and Bernas ion sources for decaborane ion beam generation were investigated. Decaborane negative ion beam as well as positive ion beam were generated and delivered to the output of mass separator. Experimental results obtained in ITEP are presented.
