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Related Experiment Video

Updated: Jul 7, 2026

A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response
09:03

A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response

Published on: January 7, 2019

Actively stabilized optical fiber interferometry technique for online/in-process surface measurement.

Kaiwei Wang1, Haydn Martin, Xiangqian Jiang

  • 1Centre for Precision Technologies, University of Huddersfield, Huddersfield HD1 3DH, United Kingdom.

The Review of Scientific Instruments
|March 5, 2008
PubMed
Summary

This study advances optical-beam scanning fiber interferometry for online nanoscale surface measurement. The developed system achieves 3.3 nm repeatability, enabling robust and miniature measurement devices.

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Area of Science:

  • Optical Engineering
  • Metrology
  • Nanotechnology

Background:

  • Existing methods for nanoscale surface measurement face challenges in speed and flexibility.
  • Online measurement systems require robust, miniature, and adaptable designs.

Purpose of the Study:

  • To report progress in optical-beam scanning fiber interferometry for online nanoscale surface measurement.
  • To develop a robust and miniature measurement device adaptable for multiprobe array systems.

Main Methods:

  • Utilized fiber-optic interferometry and wavelength-division multiplexing for probe and interferometer separation.
  • Implemented active phase tracking and stabilization for self-reference signal generation.
  • Employed optical-beam scanning for fast surface profiling.

Main Results:

  • Achieved a repeatability of 3.3 nm in sample surface measurement.
  • Demonstrated significant reduction in low-frequency noise through active stabilization.
  • Enabled flexible and fast surface scanning for online applications.

Conclusions:

  • The developed optical-beam scanning fiber interferometer shows promise for advanced online nanoscale surface metrology.
  • The system's robustness, miniature design, and noise suppression are key for future multiprobe array development.
  • This technology offers enhanced flexibility and precision for real-time surface analysis.