Development of compact high precision two degree of freedom XY piezoelectric stepping positioner

Dongwoo Kang1, Jungjae Kim, Moon G Lee

  • 1Nano-Opto-Mechatronics Laboratory, Department of Mechanical Engineering, KAIST, 373-1 Guseong-Dong, Yuseong-Gu, Daejeon 305-701, Republic of Korea. dwkang@kaist.ac.kr

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