Related Experiment Video
Updated: Jul 6, 2026

05:57
Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Interference coatings based on synthesized silicon nitride
1Institute of Optical Sciences, National Central University, Chung-Li 320, Taiwan. cclee@ios704.ios.ncu.edu.tw
Applied Optics
|March 6, 2008
Abstract:
Silicon nitrides are synthesized by ion-assisted deposition with only one coating material and a nitrogen-ion-beam source. All the SiN(x) films are amorphous and mechanically strong. A wide range of refractive indices from 3.43 to 1.72 at a wavelength of 1550 nm is obtained. Near-IR antireflection coating and a bandpass filter based on the multilayers of SiN(x) and Si are demonstrated.

