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Updated: Jul 6, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
1Institute of Optical Sciences, National Central University, Chung-Li 320, Taiwan. cclee@ios704.ios.ncu.edu.tw
Amorphous silicon nitride (SiN(x)) films were synthesized for optical coatings. These strong films exhibit tunable refractive indices, enabling applications like antireflection coatings and bandpass filters.
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