Updated: Jul 6, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
K Nakatsuhara1, T Mizumoto, E Takahashi
1Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro-Ku, Tokyo 152-8552, Japan. knakatsu@o.cc.titech.ac.jp
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