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Updated: Jul 6, 2026
Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging
Published on: April 11, 2025
Microlens formation by thin-film deposition with mesh-shaped masks
R Grunwald1, H Mischke, W Rehak
1Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie, Rudower Chaussee 6, D-12489 Berlin, Germany. grunwald@mbi-berlin.de
Abstract:
Thin-film microlens arrays with high fill factors have been fabricated in a one-step process by shading a vapor beam in a vacuum-deposition apparatus with metallic meshes placed at defined distances to the substrate surface. To generate three-dimensional mask structures with the necessary depth profiles, microgalvanic technology has been applied. Profiles and optical properties of the microlenses have been studied theoretically and experimentally.
