Shadow-angle method for anisotropic and weakly absorbing films

G Surdutovich1, R Vitlina, V Baranauskas

  • 1Departamento de Semicondutores, Instrumentos e Fotônica, Faculdade de Engenharia Elétrica e de Computacão, Unicamp, CEP 13083-970 Campinas, São Paulo, Brazil. gregory@dsif.fee.unicamp.br

Applied Optics
|March 8, 2008
PubMed
Summary

This study introduces a new method to determine a film's optical properties using two specific light incidence angles. The technique enhances the conventional Abelès method, enabling broader applications for thin film analysis.

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