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Aberration-free dynamic focusing with a multichannel micromachined membrane deformable mirror

L Zhu1, P C Sun, Y Fainman

  • 1Department of Electrical and Computer Engineering, University of California San Diego, MS 0407, 9500 Gilman Drive, La Jolla, California 92093-5003, USA. lzhu@ucsd.edu

Applied Optics
|March 8, 2008
PubMed

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Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
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The probe is regarded as the heart of any AFM setup and comprises the...