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Updated: Jul 6, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
1National Optics Institute, Sainte-Foy, Québec G1P 4N8, Canada. thibault@ino.qc.ca
This study introduces a novel device for fast, large-volume 3-D measurement using telecentric triangulation and liquid-mirror technology. The system enables precise scanning of objects up to 1 cubic meter with high resolution.
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