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Updated: Jul 6, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
F Dubois1, L Joannes, J C Legros
1Microgravity Research Center, Université Libre de Bruxelles, 50 Avenue F Roosevelt, CP165y62, B-1050 Brussels, Belgium. frdubois@ulb.ac.be
This study introduces a digital holographic microscope for 3D imaging. It uses an incoherent light source and phase-stepping to achieve extended depth of investigation without mechanical refocusing.
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