GHz frequency ZnO/Si SAW device.

Area of Science:

• * Materials Science
• * Electrical Engineering
• * Acoustics

Background:

• * Growing demand for high-frequency, low-loss filters drives innovation in waveguide technologies.
• * Surface Acoustic Wave (SAW) devices are crucial components in modern electronic systems.

Purpose of the Study:

• * To fabricate and characterize a GHz SAW device utilizing a ZnO/Si structure.
• * To explore the generation and identification of third and fifth harmonic guided waves.
• * To validate experimental findings with theoretical modeling for accurate device design.

Main Methods:

• * Fabrication of a GHz SAW device using Zinc Oxide (ZnO) on Silicon (Si) via UV photolithography.
• * Optimization of piezoelectric thin film thickness and interdigital transducer (IDT) design.
• * Generation of third (2.5 GHz) and fifth (3.5 GHz) harmonic guided waves with sub-micrometer aluminum strips.
• * Experimental measurement and theoretical identification of wave modes using a finite-element/boundary-element (FE/BE) model.

Main Results:

• * Successful fabrication of a GHz SAW device on a ZnO/Si substrate.
• * Generation of third and fifth harmonic guided waves at specified frequencies.
• * High degree of agreement between experimental measurements and theoretical predictions.
• * Comprehensive characterization of high-frequency SAW modes.

Conclusions:

• * The developed ZnO/Si SAW device effectively generates high-frequency harmonic guided waves.
• * The advanced FE/BE model accurately predicts device behavior, enabling precise design.
• * This research facilitates the accurate design of SAW devices for advanced high-frequency applications.