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Updated: Jul 6, 2026

Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes
Published on: January 19, 2020
Narrow electrodes on YZ-LiNbOO3 as an alternative to etched grooves for dispersive delay lines
Abstract:
Narrow, open-circuited aluminum electrodes can provide controllable, weak reflectivity necessary for many applications such as surface acoustic wave (SAW) tags and dispersive delay lines (DDLs). We show, using finiteand boundary element method (FEM-BEM) based simulations and experiments, that a reflectivity of 0.3% per wavelength can be achieved easily and controlled by varying the electrode width.
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