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Fabrication and characterization of diffractive optical elements in InP for monolithic integration with
J Vukusic1, J Bengtsson, M Ghisoni
1Department of Microelectronics, Chalmers and Photonics Laboratory, Microtechnology Center, Chalmers University of Technology, SE-412 96 Göteborg, Sweden. josip@elm.chalmers.se
Applied Optics
|March 14, 2008
Summary
Researchers fabricated binary diffractive optical elements (DOEs) in Indium Phosphide (InP) for 1.3 micrometer operation. These optical elements, including Fresnel lenses and a 1x4 optical fan-out device, demonstrated efficient light manipulation with small spot sizes.
Area of Science:
- Optics and Photonics
- Materials Science
- Semiconductor Devices
Background:
- Diffractive optical elements (DOEs) are crucial for advanced optical systems.
- Indium Phosphide (InP) is a key material for optoelectronic applications at 1.3 micrometers.
- Efficient fabrication of micro-scale optical structures is essential for miniaturization.
Purpose of the Study:
- To fabricate and characterize binary diffractive optical elements (DOEs) in InP.
- To evaluate the performance of Fresnel lenses and an optical fan-out element.
- To assess the fabrication process using electron-beam lithography and chemically assisted ion beam etching.
Main Methods:
- Fabrication of binary DOEs using electron-beam lithography for patterning resist.
- Employing chemically assisted ion beam etching to create surface reliefs with smooth sidewalls.
- Characterization of fabricated Fresnel lenses and a 1x4 optical fan-out element at 1.3 micrometers.
Main Results:
- Successfully fabricated Fresnel lenses and a 1x4 optical fan-out DOE in InP.
- Achieved a measured efficiency of 36% for the Fresnel lenses.
- The fan-out element showed 26% efficiency with 30% uniformity error, producing spot sizes as small as 16 micrometers.
Conclusions:
- Binary DOEs in InP can be fabricated with high precision using advanced lithography and etching techniques.
- The fabricated elements demonstrate potential for applications requiring beam splitting and focusing at 1.3 micrometers.
- Further optimization may improve efficiency and uniformity for the fan-out element.
