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Phase-shifting interferometry with uncalibrated phase shifts.

X Chen¹, M Gramaglia, J A Yeazell

¹Department of Physics, The Pennsylvania State University, University Park, Pennsylvania 16802, USA.

|March 14, 2008

Summary

This summary is machine-generated.

A new algorithm enhances phase-shifting interferometry, allowing uncalibrated phase shifters and reducing errors. This method improves measurement accuracy and includes an error correction scheme.

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Area of Science:

Optical Metrology
Interferometry
Computational Imaging

Background:

Phase-shifting interferometry (PSI) is crucial for precise optical measurements.
Traditional PSI requires calibrated phase shifters and is sensitive to intensity variations.
Existing methods struggle with imprecise phase shifts and spatial non-uniformities.

Purpose of the Study:

To develop a computationally efficient algorithm for PSI.
To enable PSI with uncalibrated phase shifters.
To achieve robustness against spatial intensity variations and implement error correction.

Main Methods:

A novel algorithm is developed for phase-shifting interferometry.
It utilizes pixel comparisons within and across interferograms (spatial and temporal aspects).
A maximum-minimum procedure is employed for cross-interferogram analysis.

Main Results:

The algorithm is computationally efficient and robust to imprecise phase shifts.
It demonstrates insensitivity to spatial intensity variations.
Experimental validation confirms theoretical predictions, showing accurate results.

Conclusions:

The developed algorithm offers a significant advancement in phase-shifting interferometry.
It allows for uncalibrated phase shifters and corrects for intensity variations.
An integrated error measure enables effective error correction, enhancing measurement reliability.