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Interference is a characteristic phenomenon exhibited by waves. When two electromagnetic waves interact with their peaks and troughs coinciding, a resulting wave with enhanced amplitude is produced. This is known as constructive interference. In this case, the two waves interacting are in phase with each other.
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Related Experiment Video

Updated: Jul 6, 2026

Micro/Nano-scale Strain Distribution Measurement from Sampling Moiré Fringes
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Published on: May 23, 2017

Fringe modulation skewing effect in white-light vertical scanning interferometry.

A Harasaki, J C Wyant

    Applied Optics
    |March 18, 2008
    PubMed
    Summary
    This summary is machine-generated.

    A batwing artifact in step height measurements using white-light vertical scanning interferometry is caused by interference fringe modulation skewing. This effect occurs near step edges when step height is less than the light source coherence length.

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    Area of Science:

    • Optical metrology
    • Surface characterization

    Background:

    • White-light vertical scanning interferometry (WL-VSI) is a key technique for precise surface profiling.
    • Step height measurement is crucial in microelectronics and material science.
    • Existing methods may encounter artifacts affecting measurement accuracy.

    Purpose of the Study:

    • To describe and explain the interference fringe modulation skewing effect in WL-VSI.
    • To identify the conditions leading to the batwing artifact in step height measurements.
    • To provide a theoretical basis for understanding and mitigating this artifact.

    Main Methods:

    • Analysis of interference fringe modulation in WL-VSI.
    • Development of a diffraction model to explain the observed skewing.
    • Simulations and experimental validation (implied).

    Main Results:

    • Identified an interference fringe modulation skewing effect.
    • The skewing produces a batwing artifact in step height measurements.
    • The artifact occurs at step edges when step height is below the light source coherence length.

    Conclusions:

    • The batwing artifact in WL-VSI step height measurements is attributed to fringe skewing.
    • Understanding this effect is critical for accurate metrology in specific scenarios.
    • The diffraction model provides a framework for analyzing this optical phenomenon.