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Interference imaging for aspheric surface testing.

P E Murphy, T G Brown, D T Moore

    Applied Optics
    |March 18, 2008
    PubMed
    Summary
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    Non-null interferometric tests can degrade accuracy due to fringe-imaging optics. This study classifies these errors and shows third-order aberration theory accurately predicts measurement errors for aspheric surfaces.

    Area of Science:

    • Optical testing
    • Metrology
    • Aberration theory

    Background:

    • Interferometric null tests achieve high accuracy (lambda/20) over limited ranges.
    • Non-null tests are necessary for larger dynamic ranges but suffer accuracy degradation.
    • Fringe-imaging optics in non-null tests introduce specific errors.

    Purpose of the Study:

    • To classify and analyze errors introduced by fringe-imaging optics in non-null interferometric tests.
    • To develop a predictive model for measurement errors based on interferometer parameters.
    • To evaluate the accuracy of third-order aberration theory for predicting these errors.

    Main Methods:

    • Classification of errors introduced by fringe-imaging optics.
    • Analysis using general and third-order aberration theory.

    Related Experiment Videos

  • Prediction of measurement error from known interferometer parameters.
  • Tabulation of errors for a fourth-order asphere with 100 mum sag.
  • Main Results:

    • Errors introduced by fringe-imaging optics in non-null tests are classified.
    • A method to predict measurement error from interferometer parameters is established.
    • Third-order aberration theory provides results comparable to exact ray-tracing for a specific asphere.

    Conclusions:

    • Third-order aberration theory is a viable approximation for predicting errors in non-null interferometric tests.
    • Understanding and predicting these errors is crucial for accurate metrology of complex optical surfaces.