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Gap measurement by position-sensitive detectors.

J K Kim1, M S Kim, J H Bae

  • 1Department of Physics, Yeungnam University, Gyongsan 712-749, Korea.

Applied Optics
|March 18, 2008
PubMed
Summary
This summary is machine-generated.

This study introduces a new system for measuring plasma display panel (PDP) gaps using position-sensitive detectors (PSDs). The technology offers high-resolution gap measurement with simple, fast signal processing for improved manufacturing accuracy.

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Area of Science:

  • Optoelectronics
  • Metrology
  • Semiconductor Manufacturing

Background:

  • Accurate gap measurement is critical for optimizing plasma display panel (PDP) performance.
  • Existing measurement systems may lack the required resolution or speed for advanced manufacturing processes.

Purpose of the Study:

  • To develop a novel, high-resolution system for measuring the gap in proximity exposure tools for PDPs.
  • To leverage position-sensitive detectors (PSDs) for efficient and accurate gap metrology.

Main Methods:

  • Utilized single or dual position-sensitive detectors (PSDs) to measure gap distances.
  • Employed a reference beam reflected from the upper gap surface and a signal beam from the lower surface.
  • Incorporated a charge-coupled-device sensor for monitoring beams and the measurement region.

Main Results:

  • Achieved a gap distance resolution of 0.5 micrometers (µm).
  • Demonstrated a measurement capture range of 500 micrometers (µm).
  • Developed a simple and fast signal processing method using analogous PSDs.

Conclusions:

  • The developed PSD-based system offers precise and efficient gap measurement for PDP manufacturing.
  • The system's high resolution and fast processing simplify and enhance the metrology process.
  • This technology contributes to improved quality control and performance in plasma display panel production.