Related Experiment Video
Updated: Jul 6, 2026

Demonstration of a Hyperlens-integrated Microscope and Super-resolution Imaging
Published on: September 8, 2017
Influence of birefringence on the image formation of high-resolution projection optics
1Optics Technology Research Center, Canon, Inc., 20-2, Kiyohara-Kogyo-Danchi, Utsunomiya-shi, Tochigi-ken 321-3292, Japan. unno@cnt.canon.co.jp
Abstract:
The influence of birefringence on high-resolution projection optics used for microlithography is investigated theoretically. A formula for partially coherent imaging that is based on the scalar diffraction theory is extended to include the birefringent properties of lens materials. By the determination of the birefringent properties of lens materials by use of random numbers, data on 200 lenses, each composed of 10 birefringent elements, are generated to estimate statistically the degree of imaging-performance degradation. As a result, it was found that the image contrast of a five-bar pattern decreases as a quadratic function of the maximum magnitude of the birefringence that was set in common for all elements in each lens data set.
More Related Videos
11:34High-resolution, High-speed, Three-dimensional Video Imaging with Digital Fringe Projection Techniques
Published on: December 3, 2013
09:38Fabrication Procedures and Birefringence Measurements for Designing Magnetically Responsive Lanthanide Ion Chelating Phospholipid Assemblies
Published on: January 3, 2018
Related Concept Videos
Focusing of Light in the Eye
Imaging Biological Samples with Optical Microscopy
In optical microscopy, the specimen to be viewed is placed on a glass slide and clipped on the stage...
Phase Contrast and Differential Interference Contrast Microscopy
In-phase-contrast microscopes, interference between light directly passing through a cell and light refracted by cellular components is used to create high-contrast, high-resolution images without staining. It is the oldest and simplest type of microscope that creates an image by altering the wavelengths of light rays passing through the specimen. Altered wavelength paths are created using an annular stop in the condenser. The annular stop produces a hollow cone of...
Influence of Earth's Curvature and Atmospheric Refraction on Leveling