Influence of birefringence on the image formation of high-resolution projection optics

Y Unno1

  • 1Optics Technology Research Center, Canon, Inc., 20-2, Kiyohara-Kogyo-Danchi, Utsunomiya-shi, Tochigi-ken 321-3292, Japan. unno@cnt.canon.co.jp

Applied Optics
|March 20, 2008
PubMed

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