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Temporal phase unwrapping applied to wavelength-scanning interferometry
L Paulsson1, M Sjödahl, J Kato
1Division of Experimental Mechanics, Luleå University of Technology, S-971 87 Luleå, Sweden.
Applied Optics
|March 20, 2008
Summary
This study introduces temporal phase unwrapping combined with wavelength-scanning interferometry for precise measurements. The methods accurately measure a 10-micrometer step using an external-cavity laser diode.
Area of Science:
- Optical metrology
- Precision measurement science
Background:
- Wavelength-scanning interferometry (WSI) is a powerful technique for optical measurements.
- Temporal phase unwrapping is crucial for resolving phase ambiguities in interferometric data.
Purpose of the Study:
- To demonstrate the efficacy of temporal phase unwrapping integrated with WSI.
- To evaluate two distinct phase unwrapping strategies for interferometric measurements.
Main Methods:
- Implementation of temporal phase unwrapping algorithms.
- Utilizing wavelength-scanning interferometry with an external-cavity laser diode.
- Comparison of reversed exponential sequence fitting and complex Fourier-transform ranging for phase unwrapping.
Main Results:
- Successful application of temporal phase unwrapping in WSI.
- Accurate measurement of a 10-micrometer step was achieved.
- Performance comparison of the two unwrapping strategies was conducted.
Conclusions:
- Temporal phase unwrapping is a viable and effective method for WSI.
- The choice of unwrapping strategy impacts measurement accuracy and applicability.
- This integrated approach enhances the precision of optical metrology techniques.
