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Sinusoidal wavelength-scanning interferometric reflectometry.

O Sasaki1, T Kuwahara, R Hara

  • 1Faculty of Engineering, Niigata University, 8050 Ikarashi 2, Niigata-shi 950-2181, Japan. osami@eng.niigata-u.ac.jp

Applied Optics
|March 20, 2008
PubMed
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We developed interferometric reflectometry using a tunable laser diode to precisely measure the positions and profiles of multiple reflecting surfaces. This technique achieves high resolution and precision for optical path difference measurements, enabling detailed surface analysis.

Area of Science:

  • Optical Metrology
  • Interferometry
  • Surface Profilometry

Background:

  • Accurate measurement of multiple reflecting surfaces is crucial in various scientific and industrial applications.
  • Existing techniques may face limitations in resolution, precision, or handling multiple surfaces simultaneously.

Purpose of the Study:

  • To introduce a novel interferometric reflectometry method for detecting positions and profiles of multiple reflecting surfaces.
  • To demonstrate the capability of the proposed method for high-precision optical path difference (OPD) measurements and surface profiling.

Main Methods:

  • Utilizing a sinusoidal wavelength-scanning tunable laser diode for interferometric measurements.
  • Extracting objective signals (modulation amplitude Z and phase alpha) from interference signals.

Related Experiment Videos

  • Employing a conjugate gradient method for accurate estimation of Z and alpha values.
  • Generating image intensity to visualize the locations of reflecting surfaces.

    • Main Results:

    • Achieved a resolution of approximately 60 microm for two-optical-path difference (OPD) in image intensity.
    • Demonstrated final OPD precisions of 2 microm for two surfaces and 8 microm for three surfaces with a 7 nm wavelength-scanning width.
    • Measured profiles of front and rear surfaces of a 20 microm silica glass plate with a precision of approximately 10 nm.

    Conclusions:

    • Interferometric reflectometry with wavelength scanning offers a robust method for multi-surface metrology.
    • The technique provides high precision and resolution for determining surface positions and profiles.
    • This method has potential applications in fields requiring precise optical measurements of complex surfaces.